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Ultra-high Res FESEM | SEM5000X

Ultra-high Resolution Field Emission Scanning Electron Microscopy (FESEM) Challenges the Limits

 

The CIQTEK SEM5000X is an ultra-high resolution FESEM with optimized electron optics column design, reducing overall aberrations by 30%, achieving ultra-high resolution of 0.6 nm@15 kV and 1.0 nm@1 kV. Its high resolution and stability make it advantageous in advanced nano-structural materials research, as well as the development and manufacturing of high-technology node semiconductor IC chips.

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▶ Electron Optics

 

SEM5000X Electron Optics

Objective Lens Upgrade

Lens chromatic aberration was reduced by 12%, lens spherical aberration was reduced by 20%, and overall aberration was reduced by 30%.

 

SEM5000X Electron Optics

Dual Beam Deceleration Technology

In-lens beam deceleration, applicable to specimens with large volumes, cross-sections, and irregular surfaces. Dual deceleration technology (In-lens beam deceleration + specimen stage tandem beam deceleration) challenges the limits of specimen surface signal-capturing scenarios.

▶ Low-voltage High-resolution Images

 

▶ In-lens Electron Detector / Specimen

▶ Everhart-Thornley Detector (ETD)

▶ Retractable Back-Scattered Electron Detector (BSED) *Optional

FESEM Retractable Back-Scattered Electron Detector (BSED)

▶ BSED-based ECCI mode (Electron Channeling Contrast Imaging)

The "Electron Channeling effect" refers to a significant reduction in electron scattering by crystal lattices, when the incident electron beam satisfies the Bragg diffraction condition, allowing a large number of electrons to pass through the lattice, thus exhibiting a "channeling" effect.

For polycrystalline materials with uniform composition and polished flat surfaces, the intensity of backscattered electrons relies on the relative orientation between the incident electron beam and crystal planes. Grains with larger orientation variation exhibit stronger signals therefore brighter images, qualitative characterization with such grain orientation map is achieved.

▶ Simultaneously Multi-channel Imaging via Various Detectors

▶ Retractable Scanning Transmission Electron Microscopy (STEM) Detector

FESEM Retractable Scanning Transmission Electron Microscopy (STEM) Detector

 

>> Multiple Operating Modes: Bright-field (BF) imaging, Dark-field (DF) imaging, High-angle annular dark-field (HAADF) imaging

▶ Advances in CIQTEK Electron Microscopy - More Options

 

>> Energy Dispersive Spectrometry

  • Energy Dispersive Spectrometry

 

>> Catholuminescence

  • sem image analysis -Catholuminescence
  • sem image analysis - Catholuminescence

 

>> EBSD

  • sem EBSD
  • sem EBSD

 

▶ Particle & Pore Analysis Software (Particle) *Optional

SEM Particle & Pore Analysis Software (Particle)

The CIQTEK SEM Microscope software employs various target detection and segmentation algorithms, suitable for different types of particle and pore samples. it enables quantitative analysis of particle and pore statistics and can be applied in fields such as materials science, geology, and environmental science.

▶ Image Post-processing Software *Optional

SEM Microscope Image Post-processing Software

Perform online or offline image post-processing on images captured by electron microscopes and integrate commonly used EM image processing functions, convenient measurement, and annotation tools.

▶ Auto Measure *Optional

SEM Microscope software Auto Measure

Automatic recognition of line width edges, resulting in more accurate measurements and higher consistency. Support multiple edge detection modes, such as Line, Space, Pitch, etc. Compatible with multiple image formats and equipped with various commonly used image post-processing functions. The software is easy to use, efficient, and accurate.

▶ Software Development Kit (SDK) *Optional

SEM Microscope Software Development Kit (SDK)

Provide a set of interfaces for controlling the SEM microscope, including image acquisition, operating condition settings, power on/off, stage control, etc. Concise interface definitions allow for the rapid development of specific electron microscope operation scripts and software, enabling automated tracking of regions of interest, industrial automation data acquisition, image drift correction, and other functions. Can be used for software development in specialized areas such as diatom analysis, steel impurity inspection, cleanliness analysis, raw material control, etc.

▶ AutoMap *Optional

FESEM Microscope software Auto Measure

 

CIQTEK SEM5000X FESEM Microscope Specifications
Electron Optics Resolution 0.6 nm @ 15 kV, SE
1.0 nm @ 1 kV, SE
Acceleration Voltage 0.02kV ~30 kV
Magnification 1 ~ 2,500,000 x
Electron Gun Type Schottky Field Emission Electron Gun
Specimen Chamber Cameras Dual Cameras (optical navigation + chamber monitor)
Stage Type 5-Axis Mechanical Eucentric Specimen Stage
Stage Range X=110 mm, Y=110 mm, Z=65 mm
T: -10*~+70°, R: 360°
SEM Detectors and Extensions Standard In-lens Detector
Everhart-Thornley Detector (ETD)
Optional

Retractable Back-Scattered Electron Detector (BSED)

Retractable Scanning Transmission Electron Microscopy Detector (STEM)

Low Vacuum Detector (LVD)

Energy Dispersive Spectrometer (EDS / EDX)

Electron Backscatter Diffraction Pattern (EBSD)

Specimen Exchange Loadlock (4 inch / 8 inch)

Trackball & Knob Control Panel

Duo-Dec mode (Duo-Dec)
User Interface Languages English
Operating System Windows
Navigation Optical Navigation, Gesture Quick Navigation, Trackball (optional)
Automatic Functions Auto Brightness & Contrast, Auto Focus, Auto Stigmator

 

Hot Tags : scanning electron microscope magnification field emission scanning electron microscope feg microscope scanning electron microscopy energy dispersive spectroscopy scanning electron microscope instrument sem detectors scanning electron microscope cost sem technique
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