Ultra-high Resolution Field Emission Scanning Electron Microscopy (FESEM): 0.6 nm@15 kV and 1.0 nm@1 kV
The CIQTEK SEM5000X ultra-high resolution FESEM utilizes the upgraded column engineering process, “SuperTunnel” technology, and high-resolution objective lens design to improve low-voltage imaging resolution.
The FESEM SEM5000X specimen chamber ports extend to 16, and the specimen exchange load-lock supports up to 8-inch wafer size (maximum diameter 208 mm), significantly expanding the applications. The advanced scanning modes and enhanced automated functions bring stronger performance and an even more optimized experience.
(*Optional accessories for FESEM SEM5000X)
CIQTEK FESEM SEM5000X Specifications |
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Key Parameters | Resolution |
0.6 nm @ 15 kV, SE 1.0 nm @ 1 kV, SE |
Acceleration Voltage | 0.02~30 kV | |
Magnification | 1~2,500,000 x | |
Electron Gun Type | Schottky Field Emission Electron Gun | |
Specimen Chamber |
Vacuum System
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Fully Automated Control |
Cameras | Dual Cameras (optical navigation + chamber monitor) | |
Stage Type | 5-Axis Mechanical Eucentric Specimen Stage | |
Stage Range |
X=110 mm, Y=110 mm, Z=65 mm T: -10*~+70°, R: 360° |
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SEM Detectors and Extensions | Standard |
In-lens Detector Everhart-Thornley Detector (ETD) |
Optional |
Retractable Back-Scattered Electron Detector (BSED) Retractable Scanning Transmission Electron Microscopy Detector (STEM) Energy Dispersive Spectrometer (EDS/EDX) Electron Backscatter Diffraction Pattern (EBSD) Specimen Exchange Loadlock (4" & 8" optional) Trackball & Knob Control Panel Specimen Stage Tandem Deceleration Magnetic Field & Acoustic Noise Enclosure System (SEMI Certified) |
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Software | Languages |
English |
Operating System |
Windows |
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Navigation |
Nav-Cam, Gesture Quick Navigation |
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Automatic Functions |
Auto Brightness & Contrast, Auto Focus, Auto Stigmator |