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Ultra-high Res FESEM | SEM5000X

Ultra-high Resolution Field Emission Scanning Electron Microscopy (FESEM): 0.6 nm@15 kV and 1.0 nm@1 kV

 

The CIQTEK SEM5000X ultra-high resolution FESEM utilizes the upgraded column engineering process, “SuperTunnel” technology, and high-resolution objective lens design to improve low-voltage imaging resolution.

The FESEM SEM5000X specimen chamber ports extend to 16, and the specimen exchange load-lock supports up to 8-inch wafer size (maximum diameter 208 mm), significantly expanding the applications. The advanced scanning modes and enhanced automated functions bring stronger performance and an even more optimized experience.

CIQTEK FESEM SEM5000X Specifications

Key Parameters Resolution

0.6 nm @ 15 kV, SE

1.0 nm @ 1 kV, SE

Acceleration Voltage 0.02~30 kV
Magnification 1~2,500,000 x
Electron Gun Type Schottky Field Emission Electron Gun
Specimen Chamber
Vacuum System
Fully Automated Control
Cameras Dual Cameras (optical navigation + chamber monitor)
Stage Type 5-Axis Mechanical Eucentric Specimen Stage
Stage Range

X=110 mm, Y=110 mm, Z=65 mm

T: -10*~+70°, R: 360°

SEM Detectors and Extensions Standard

In-lens Detector

Everhart-Thornley Detector (ETD)

Optional

Retractable Back-Scattered Electron Detector (BSED)

Retractable Scanning Transmission Electron Microscopy Detector (STEM)

Energy Dispersive Spectrometer (EDS/EDX)

Electron Backscatter Diffraction Pattern (EBSD)

Specimen Exchange Loadlock (4" & 8" optional)

Trackball & Knob Control Panel

Specimen Stage Tandem Deceleration

Magnetic Field & Acoustic Noise Enclosure System (SEMI Certified)

Software Languages

English

Operating System

Windows

Navigation

Nav-Cam, Gesture Quick Navigation

Automatic Functions

Auto Brightness & Contrast, Auto Focus, Auto Stigmator

 

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