field emission scanning electron microscope fe sem

FESEM | SEM4000Pro

Analytical Field Emission Scanning Electron Microscope (FESEM) with Large Beam I

 

CIQTEK SEM4000Pro is an analytical model of FE-SEM, equipped with a high-brightness and long-life Schottky field emission electron gun. The 3-stage electromagnetic lens design offers significant advantages in analytical applications such as EDS / EDX, EBSD, WDS, and more. It comes standard with a low vacuum mode and high-performance low vacuum secondary electron detector, as well as a retractable backscattered electron detector, which benefits the observation of poorly conductive or non-conductive specimens.

 

Electron Optics

sem4000pro Electron Optics

Low Vacuum Mode

Under low-vacuum mode, a range of 10-180 Pa can be reached without a pressure-limiting aperture. The specially designed objective lens vacuum chamber minimizes the electron mean free path in low vacuum conditions and achieves a resolution of 1.5 nm at 30 kV under low vacuum mode.

The secondary electron emission from the specimen surface ionizes air molecules and simultaneously generates electrons, ions, and photons. The generated electrons further ionize other air molecules, low-vacuum secondary electron detector (LVD) captures a large amount of photon signals produced in such a process.

  • SEM Low Vacuum Mode
  • SEM Low Vacuum Mode

 

The incident electron beam ionizes air molecules on the specimen surface, generating electrons and ions. These ions neutralize the surface's charging, thus reducing the charging effect.

 

Particle & Pore Analysis Software (Particle) *Optional

SEM Particle & Pore Analysis Software (Particle)

The CIQTEK SEM Microscope software employs various target detection and segmentation algorithms, suitable for different types of particle and pore samples. it enables quantitative analysis of particle and pore statistics and can be applied in fields such as materials science, geology, and environmental science.


Image Post-processing Software *Optional

SEM Microscope Image Post-processing Software

Perform online or offline image post-processing on images captured by electron microscopes and integrate commonly used EM image processing functions, convenient measurement, and annotation tools.


Auto Measure *Optional

SEM Microscope software Auto Measure

Automatic recognition of line width edges, resulting in more accurate measurements and higher consistency. Support multiple edge detection modes, such as Line, Space, Pitch, etc. Compatible with multiple image formats and equipped with various commonly used image post-processing functions. The software is easy to use, efficient, and accurate.


Software Development Kit (SDK) *Optional

SEM Microscope Software Development Kit (SDK)

Provide a set of interfaces for controlling the SEM microscope, including image acquisition, operating condition settings, power on/off, stage control, etc. Concise interface definitions allow for the rapid development of specific electron microscope operation scripts and software, enabling automated tracking of regions of interest, industrial automation data acquisition, image drift correction, and other functions. Can be used for software development in specialized areas such as diatom analysis, steel impurity inspection, cleanliness analysis, raw material control, etc.


AutoMap *Optional

FESEM Microscope software Auto Measure

 

 

CIQTEK SEM4000Pro FESEM Microscope Specificationss
Electron Optics Resolution High Vacuum

0.9 nm @ 30 kV, SE

Low Vacuum

2.5 nm @ 30 kV, BSE, 30 Pa

1.5 nm @ 30 kV, SE, 30 Pa

Acceleration Voltage 0.2 kV ~ 30 kV
Magnification (Polaroid) 1 ~ 1,000,000 x
Electron Gun Type Schottky Field Emission Electron Gun
Specimen Chamber Low Vacuum Max 180 Pa
Camera Dual Cameras (Optical navigation + chamber monitoring)
XY Range 110 mm
Z Range 65 mm
T Range -10° ~ +70°
R Range 360°
SEM Detectors and Extensions Standard

Everhart-Thornley Detector (ETD)

Low Vacuum Detector (LVD)

Backscattered Electron Detector (BSED)

Optional

Retractable Scanning Transmission Electron Microscopy Detector (STEM)

Energy Dispersive Spectrometer (EDS / EDX)

Electron Backscatter Diffraction Pattern (EBSD)

Specimen Exchange Loadlock (4 inch / 8 inch)

Trackball & Knob Control Panel

User Interface Language English
OS Windows
Navigation Optical navigation, Gesture quick navigation, Trackball (optional)
Automatic Functions Auto Brightness & Contrast, Auto Focus, Auto Stigmator
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