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FIB-SEM | DB550

Field Emission Scanning Electron Microscope (FE-SEM) with Focused Ion Beam (FIB) Columns

The CIQTEK DB550 Focused Ion Beam Scanning Electron Microscope (FIB-SEM) has a focused ion beam column for nano-analysis and specimen preparation. It utilizes “super tunnel” electron optics technology, low aberration and non-magnetic objective design, and has the “low voltage, high resolution” feature to ensure its nanoscale analytical capabilities.

The ion columns facilitate a Ga+ liquid metal ion source with highly stable and high quality ion beams to ensure nanofabrication capabilities. The DB550 is an all-in-one nano-analysis and fabrication workstation with an integrated nano-manipulator, gas injection system, and user-friendly GUI software.

"SuperTunnel" Electron Optics Technology
Gallium Ion Beam
Excellent Expandability

Integrated Gas Injection System
Integrated Nano-manipulator
Specimen Exchange Loadlock
(8 inches compatible)

1. "Super Tunnel" electron optics column technology/in-column beam deceleration

Decrease spatial charging effect, ensuring low voltage resolution performance.

2. Crossover-free in the electron beam path

Effectively reduce lens aberrations and improve resolution.

3. Electromagnetic & electrostatic compound objective lens

Reduce aberrations, significantly improve resolution at low voltages, and enable observation of magnetic samples.

4. Water-cooled constant-temperature objective lens

Ensure the stability, reliability, and repeatability of the objective lens performance.

5. Variable multi-hole aperture switching system by electro-magnetic beam deflection

Automatic switching between apertures without mechanical motion allows fast switching among various imaging modes.

CIQTEK DB550 FIB-SEM Technical Highlights

FIBSEM - Focused Ion Beam Column

Focused Ion Beam (FIB) Column

Resolution: 3 nm@30 kV

Probe current: 1 pA to 65 nA

Acceleration voltage range: 0.5 kV to 30 kV

Ion source exchange interval: ≥1000 hours

Stability: 72 hours of uninterrupted operation

FIBSEM - Nano-manipulator

Nano-manipulator

Chamber internally mounted

Three-axis all-piezoelectrically driven

Stepper motor accuracy ≤10 nm

Maximum travel speed 2 mm/s

Integrated control system

FIBSEM - Ion Beam-Electron Beam Collaboration

Ion Beam-Electron Beam Collaboration

FIBSEM - Gas Injection System

Gas Injection System

Single GIS design

Various gas precursor sources available

Needle insertion distance ≥35 mm

Motion repeatability ≤10 μm

Heating temperature control repeatability ≤0.1°C

Heating range: room temperature to 90°C (194°F)

Integrated control system

>> Semiconductor

In the semiconductor industry, IC chips may encounter various failures. Various methods are used to analyze the chips to improve reliability. In particular, focused ion beam (FIB) analysis is a reliable analytical technique.

Specimen Characterization / Micro-Nano Fabrication / Cross-section Analysis / TEM Specimen Preparation / Failure Analysis

Cross-Section Observation
Large-scale Milling on PCB Cross-section
TEM Specimen Preparation

>> New Energy Industry

Observation and analysis of material cross-sections for research and process development.

Morphology Observation / Particle Size Analysis / Cross-section Analysis / Composition and Phase Analysis / Failure Analysis of Lithium-ion Battery Material / TEM Sample Preparation

Surface of Ternary Li Battery Materials
Cross-section of Ternary Li Battery Materials
Surface Processing Location of Proton Exchange Membranes

>> Ceramic Material

Material analysis: The FIB-SEM system can perform high-precision micro-nano machining and imaging of ceramic materials, combined with various signal detection modes such as backscattered electrons (BSE), energy-dispersive X-ray spectroscopy (EDX), Electron Backscattered Diffraction Pattern (EBSD), and secondary ion mass spectrometry (SIMS), to study the material in micro to nano-scale with three-dimensional space in depth.

Surface of Ceramic Materials
Surface of Ceramic Materials
Cross-section of Ceramic Materials

>> Alloy Material

To increase the strength, hardness, toughness, etc., of metals, other substances such as ceramics, metals, fibers, etc., are added into the metal using methods such as metallurgy, casting, extrusion, etc., which are called reinforced phases.

TEM specimen prepared by an FIB-SEM is used to observe information such as reinforced phases and boundary atoms through transmitted electron signals. TEM specimens can be used for transmission Kikuchi Diffraction (TKD) analysis, metallographic analysis, compositional analysis, and in-situ testing of alloy cross-section.

Surface of Titanium Metal
Lamella Lift-out by Nano-manipulator
Reinforced Phases in Titanium Metal Lamella

▶ Graphic User Interface

Highly integrated user interface platform

SEM microscope imaging and processing functions are integrated within an overall user interface, with comparative references displayed on the left and right.

Self-developed accessories hardware and user interfaces such as gas injection system and nano-manipulator, intuitive design of layout for easy-to-use operation.

▶ Specimen Exchange Loadlock

Effectively reduce chamber contamination Linear guiding rail design, drawer-style opening and closing.

▶ Advances in CIQTEK Electron Microscopy - More Options

>> Energy Dispersive Spectrometry

>> Catholuminescence

>> EBSD

CIQTEK FIB-SEM Focused Ion Beam Scanning Electron Microscope

CIQTEK FIB-SEM Practical Demonstration - TEM Sample Preparation

CIQTEK Scanning Electron Microscopes YouTube Video Playlist

CIQTEK Scanning Electron Microscopes YouTube Videos: Watch More >>

CIQTEK FIB-SEM DB550 Specifications
Electron Optics	Electron Gun Type	High Brightness Schottky Field Emission Electron Gun
	Resolution	0.9 nm@15 kV; 1.6 nm@1 kV
	Acceleration Voltage	0.02 kV to 30 kV
Ion Beam System	Ion Source Type	Gallium
	Resolution	3 nm@30 kV
	Acceleration Voltage	0.5 kV to 30 kV
Specimen Chamber	Vacuum System	Fully Automatic Control, Oil-free Vacuum System
	Cameras	Three Cameras (Optical navigation x1 + chamber monitor x2)
	Stage Type	Motorized 5-axis Mechanical Eucentric Specimen Stage
	Stage Range	X=110 mm, Y=110 mm, Z=65 mm T: -10°~+70°, R:360°
SEM Detectors and Extensions	Standard	In-lens Electron Detector Everhart-Thornley Detector (ETD)
SEM Detectors and Extensions	Optional	Retractable Back-Scattered Electron Detector (BSED) Retractable Scanning Transmission Electron Microscopy Detector (STEM) Energy Dispersive Spectrometer (EDS/EDX) Electron Backscatter Diffraction Pattern (EBSD) Nano-manipulator Gas Injection System Plasma Cleaner Specimen Exchange Loadlock Trackball & Knob Control Panel
User Interface	Languages	English
	Operating System	Windows
	Navigation	Optical Navigation, Gesture Quick Navigation
	Automatic Functions	Auto Brightness & Contrast, Auto Focus, Auto Stigmator

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FIB-SEM | DB550

CIQTEK DB550 FIB-SEM Technical Highlights

▶ Graphic User Interface

▶ Everhart-Thornley Detector (ETD)

▶ In-lens Electron Detector

▶ Retractable Back-Scattered Electron Detector (BSED) *Optional

▶ Scanning Transmission Electron Microscopy Detector (STEM) *Optional

▶ Specimen Exchange Loadlock

▶ Advances in CIQTEK Electron Microscopy - More Options

▶ **Retractable Back-Scattered Electron Detector (BSED) *Optional**

**▶ Scanning Transmission Electron Microscopy Detector (STEM) *Optional**