field emission scanning electron microscopy

FESEM | SEM5000Pro

High Resolution under Low Excitation

 

The CIQTEK SEM5000Pro is a Schottky field emission scanning electron microscope (FE-SEM) specialized at high resolution even under low excitation voltage. Employing an advanced "Super-Tunnel" electron optics technology facilitates a crossover-free beam path together with an electrostatic-electromagnetic compound lens design.

These advancements reduce spatial charging effect, minimize lens aberrations, enhance imaging resolution at low voltage, and achieve a resolution of 1.2 nm at 1 kV, which allows for direct observation of non-conductive or semi-conductive samples, effectively reducing sample irradiation damage.

Electron Optics

sem3200 Intermittent Anode

 

"Super Tunnel" electron optics column technology/in-lens beam deceleration
Decrease spatial charging effect, ensuring low voltage resolution.

★ Crossover-free in the electron beam path
Effectively reduce lens aberrations and improve resolution.

★ Electromagnetic & electrostatic compound objective lens
Reduce aberrations, significantly improve resolution at low voltages, and enable observation of magnetic samples.

★ Water-cooled constant-temperature objective lens
Ensure the stability, reliability, and repeatability of the objective lens operation.

★ Variable multi-hole aperture with electromagnetic beam deflection system
Automatic switching between apertures without mechanical motion, allowing fast switching between imaging modes.


Low-voltage High-resolution Images

 


In-lens Electron Detector / Specimen


Everhart-Thornley Detector (ETD)


Retractable Back-Scattered Electron Detector (BSED) *Optional

FESEM Retractable Back-Scattered Electron Detector (BSED)

BSED-based ECCI mode (Electron Channeling Contrast Imaging)

The "Electron Channeling effect" refers to a significant reduction in electron scattering by crystal lattices, when the incident electron beam satisfies the Bragg diffraction condition, allowing a large number of electrons to pass through the lattice, thus exhibiting a "channeling" effect.

For polycrystalline materials with uniform composition and polished flat surfaces, the intensity of backscattered electrons relies on the relative orientation between the incident electron beam and crystal planes. Grains with larger orientation variation exhibit stronger signals therefore brighter images, qualitative characterization with such grain orientation map is achieved.


Simultaneously Multi-channel Imaging via Various Detectors


Retractable Scanning Transmission Electron Microscopy (STEM) Detector

FESEM Retractable Scanning Transmission Electron Microscopy (STEM) Detector

 

>> Multiple Operating Modes: Bright-field (BF) imaging, Dark-field (DF) imaging, High-angle annular dark-field (HAADF) imaging


Advances in CIQTEK Electron Microscopy - More Options

 

>> Energy Dispersive Spectrometry

  • Energy Dispersive Spectrometry

 

>> Catholuminescence

  • sem image analysis -Catholuminescence
  • sem image analysis - Catholuminescence

 

>> EBSD

  • sem EBSD
  • sem EBSD

 

CIQTEK FESEM Microscope SEM5000Pro Image Gallery


>> Materials Science - Nanomaterials


>> Materials Science - Energy Materials


>> Materials Science - Polymer Materials and Metal Materials


>> Magnetic Materials - Polymer materials and metal materials


>> Semiconductor Materials


>> Life Science

Characterization of iridophores in lizard skin cells, using the STEM detector in the CIQTEK SEM5000Pro FE-SEM.

Animal colors in nature can be classified into two categories based on their formation mechanisms: pigment colors and structural colors.
Pigment colors are achieved through variations in pigment composition and the overlapping of colors, similar to the principles of "primary colors."
Structural colors, on the other hand, are generated through the reflection of light of different wavelengths by intricate physiological structures, based primarily on principles of optics. Iridophores, found in lizard skin cells, possess structures similar to diffraction gratings. We refer to these structures as "crystalline plates." Crystalline plates can reflect and scatter light of different wavelengths. Studies have shown that by varying the size, spacing, and angle of the crystalline plates in lizard iridophores, the wavelengths of light scattered and reflected by their skin can be altered. This finding is significant for understanding the mechanisms behind color change in lizard skin.

  • sem image analysis lizard skin cells
  • sem image analysis lizard skin cells

 

Particle & Pore Analysis Software (Particle) *Optional

SEM Particle & Pore Analysis Software (Particle)

The CIQTEK SEM Microscope software employs various target detection and segmentation algorithms, suitable for different types of particle and pore samples. it enables quantitative analysis of particle and pore statistics and can be applied in fields such as materials science, geology, and environmental science.


Image Post-processing Software *Optional

SEM Microscope Image Post-processing Software

Perform online or offline image post-processing on images captured by electron microscopes and integrate commonly used EM image processing functions, convenient measurement, and annotation tools.


Auto Measure *Optional

SEM Microscope software Auto Measure

Automatic recognition of line width edges, resulting in more accurate measurements and higher consistency. Support multiple edge detection modes, such as Line, Space, Pitch, etc. Compatible with multiple image formats and equipped with various commonly used image post-processing functions. The software is easy to use, efficient, and accurate.


Software Development Kit (SDK) *Optional

SEM Microscope Software Development Kit (SDK)

Provide a set of interfaces for controlling the SEM microscope, including image acquisition, operating condition settings, power on/off, stage control, etc. Concise interface definitions allow for the rapid development of specific electron microscope operation scripts and software, enabling automated tracking of regions of interest, industrial automation data acquisition, image drift correction, and other functions. Can be used for software development in specialized areas such as diatom analysis, steel impurity inspection, cleanliness analysis, raw material control, etc.


AutoMap *Optional

FESEM Microscope software Auto Measure

 

CIQTEK FESEM Microscope SEM5000Pro Specifications

Electron Optics Resolution

0.8 nm @ 15 kV, SE

1.2 nm @ 1.0 kV, SE

Acceleration Voltage 0.02kV ~ 30 kV
Magnificationn (Polaroid) 1 ~ 2,500,000 x
Electron Gun Type Schottky Field Emission Electron Gun
Specimen Chamber Camera Dual Cameras (Optical navigation + chamber monitor)
Stage Range

X: 110 mm, Y: 110 mm, Z: 50 mm

T: -10°~ +70°, R: 360°

SEM Detectors and Extensions Standard

Inlens Electron Detector

Everhart-Thornley Detector (ETD)

Optional

Retractable Backscattered Electron Detector (BSED)

Retractable Scanning Transmission Electron Microscope(STEM)

Low Vacuum Detector(LVD)

Energy Dispersive Spectroscopy (EDS / EDX)

Electron Backscatter Diffraction Pattern (EBSD)

Specimen Exchange Loadlock (4 inch /8 inch)

Trackball & Knob Control Panel

Software Language English
Operating System Windows
Navigation Optical Navigation, Gesture Quick Navigation, Trackball (optional)
Automatic Functions Auto Brightness & Contrast, Auto Focus, Auto Stigmator

 

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